Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899789 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2005-05-31 |
| 6875306 | Vacuum processing device | — | 2005-04-05 |
| 6838833 | Plasma processing apparatus | Masatsugu Arai, Ryujiro Udo, Masanori Kadotani, Motohiko Yoshigai | 2005-01-04 |