Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-11-29 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-06-14 |
| 6899789 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2005-05-31 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-05-03 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-04-19 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2005-01-25 |