Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-11-29 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-06-14 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-05-03 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-04-19 |