Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-11-29 |
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki | 2005-07-19 |
| 6917844 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Tetsuya Tahara, Shoji Okiguchi, Hideki Yamasaki | 2005-07-12 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-06-14 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-05-03 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-04-19 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |