Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-09-06 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
| 6917844 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Kouji Nishihata, Tetsuya Tahara, Hideki Yamasaki | 2005-07-12 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-04-26 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-02-08 |