Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Kouji Nishihata | 2005-07-19 |
| 6917844 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Kouji Nishihata, Tetsuya Tahara, Shoji Okiguchi | 2005-07-12 |