Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |