Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
| 6901306 | Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system | Hideaki Kondo, Juntaro Arima | 2005-05-31 |