Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |