Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6939435 | Plasma processing apparatus and processing method | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima | 2005-09-06 |
| 6939433 | Sample processing apparatus and sample processing system | Hideyuki Yamamoto | 2005-09-06 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Akira Kagoshima, Daisuke Shiraishi, Junichi Tanaka | 2005-06-21 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2005-04-19 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Kazue Takahashi | 2005-04-12 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |
| 6841032 | Plasma processing apparatus for adjusting plasma processing through detecting plasma processing state within chamber | Junichi Tanaka, Hideyuki Yamamoto | 2005-01-11 |