Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Ryoji Nishio, Nobuyuki Mise | 2005-11-22 |
| 6923885 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto +1 more | 2005-08-02 |
| 6899789 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2005-05-31 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara | 2005-04-12 |
| 6867144 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Saburou Kanai | 2005-03-15 |