Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914207 | Plasma processing method | Tadayoshi Kawaguchi, Tadamitsu Kanekiyo, Akihiko Mitsuda, Takeshi Shimada | 2005-07-05 |
| 6895179 | Wafer stage for wafer processing apparatus | Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Hideki Kihara, Koji Okuda | 2005-05-17 |
| 6867144 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Kazue Takahashi | 2005-03-15 |