Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Kazue Takahashi, Nobuyuki Mise | 2005-11-22 |
| 6895179 | Wafer stage for wafer processing apparatus | Seiichiro Kanno, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2005-05-17 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |