Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919274 | LSI device etching method and apparatus thereof | Tsuyoshi Yoshida, Eiji Ikegami, Kouichi Nakaune, Masamichi Sakaguchi, Yasuyuki Miyamoto +1 more | 2005-07-19 |
| 6846363 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |