Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899766 | Diagnosis method for semiconductor processing apparatus | Go Miya, Junichi Tanaka, Hideyuki Yamamoto | 2005-05-31 |
| 6866744 | Semiconductor processing apparatus and a diagnosis method therefor | Go Miya, Junichi Tanaka, Hideyuki Yamamoto | 2005-03-15 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |