Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962472 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2005-11-08 |
| 6895685 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2005-05-24 |
| 6895179 | Wafer stage for wafer processing apparatus | Seiichiro Kanno, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda | 2005-05-17 |
| 6867144 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2005-03-15 |
| 6850012 | Plasma processing apparatus | Manabu Edamura, Kazuyuki Ikenaga, Akitaka Makino | 2005-02-01 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2005-01-25 |
| 6837005 | Weatherstrip for automobile | Mithuaki Arata, Hitoshi Hamanaka, Kazuhiko Tokutomi | 2005-01-04 |