Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962472 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2005-11-08 |
| 6895685 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2005-05-24 |
| 6894334 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2005-05-17 |