Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962472 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2005-11-08 |
| 6895685 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2005-05-24 |