Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911157 | Plasma processing method and apparatus using dynamic sensing of a plasma environment | Manabu Edamura, Hideyuki Yamamoto | 2005-06-28 |
| 6850012 | Plasma processing apparatus | Manabu Edamura, Ken Yoshioka, Akitaka Makino | 2005-02-01 |