Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911157 | Plasma processing method and apparatus using dynamic sensing of a plasma environment | Hideyuki Yamamoto, Kazuyuki Ikenaga | 2005-06-28 |
| 6850012 | Plasma processing apparatus | Kazuyuki Ikenaga, Ken Yoshioka, Akitaka Makino | 2005-02-01 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2005-01-25 |