Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897403 | Plasma processing method and plasma processing apparatus | Ryujiro Udo, Motohiko Yoshigai, Masanori Kadotani | 2005-05-24 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |
| 6838833 | Plasma processing apparatus | Ryujiro Udo, Naoyuki Tamura, Masanori Kadotani, Motohiko Yoshigai | 2005-01-04 |