Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Kazuhiro Jyouo, Tetsuo Ono | 2005-12-06 |
| 6961131 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Tetsunori Kaji | 2005-11-01 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka, Kenji Tamaki +1 more | 2005-07-12 |
| 6903826 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Tatehito Usui, Takashi Fujii, Tetsunori Kaji, Hideyuki Yamamoto | 2005-06-07 |
| 6897403 | Plasma processing method and plasma processing apparatus | Ryujiro Udo, Masatsugu Arai, Masanori Kadotani | 2005-05-24 |
| 6837937 | Plasma processing apparatus | Susumu Tauchi, Masanori Kadotani, Muneo Furuse | 2005-01-04 |
| 6838833 | Plasma processing apparatus | Masatsugu Arai, Ryujiro Udo, Naoyuki Tamura, Masanori Kadotani | 2005-01-04 |