Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Kazuhiro Jyouo | 2005-12-06 |
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Ryoji Nishio, Kazue Takahashi, Nobuyuki Mise | 2005-11-22 |
| 6888094 | Plasma processing method and plasma processing apparatus | Katsumi Setoguchi, Hideyuki Yamamoto | 2005-05-03 |
| 6849191 | Method and apparatus for treating surface of semiconductor | Tatsumi Mizutani, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2005-02-01 |