Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896861 | Silicon oxide layer reduced in dangling bonds through treatment with hypofluorous acid, process for growing silicon oxide layer and method for deactivating dangling bonds therein | — | 2005-05-24 |
| 6841321 | Method and system for processing a semi-conductor device | Shunichi Matsumoto, Yasuhiro Yoshitake | 2005-01-11 |