Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2005-08-09 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-05-31 |