Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai | 2005-08-09 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai, Masahiro Watanabe | 2005-05-31 |
| 6879392 | Method and apparatus for inspecting defects | Kaoru Sakai, Shunji Maeda, Masahiro Watanabe | 2005-04-12 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Yuji Takagi, Chie Shishido | 2005-01-11 |