Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |