Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929892 | Method of monitoring an exposure process | Chie Shishido, Yuki Ojima, Maki Tanaka, Wataru Nagatomo | 2005-08-16 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Osamu Komuro, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6897445 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2005-05-24 |