Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936819 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2005-08-30 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Hidetoshi Morokuma, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Yasuhiko Ozawa, Hideo Todokoro | 2005-03-29 |