Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963067 | Scanning electron microscope and sample observing method using it | Shuichi Takeuchi, Mine Nakagawa, Mitsugu Sato, Kazutaka Nimura | 2005-11-08 |
| 6936818 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Satoru Yamaguchi, Osamu Komuro, Yasuhiko Ozawa, Hideo Todokoro | 2005-03-29 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Shoji Yoshida, Satoru Yamaguchi +1 more | 2005-03-08 |