Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946665 | Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus | Masato Muraki, Yoshinori Nakayama, Hiroya Ohta, Norio Saitou | 2005-09-20 |
| 6936818 | Charged particle beam apparatus | Atsushi Takane, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6919574 | Electron beam exposure apparatus, deflection apparatus, and electron beam exposure method | Shin Hashimoto, Masato Muraki | 2005-07-19 |
| 6917045 | Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method | Shin Hashimoto, Masato Muraki | 2005-07-12 |
| 6870171 | Exposure apparatus | Masaki Hosoda, Masato Muraki, Hiroya Ohta | 2005-03-22 |