Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946665 | Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus | Masato Muraki, Yoshinori Nakayama, Haruo Yoda, Norio Saitou | 2005-09-20 |
| 6870171 | Exposure apparatus | Masaki Hosoda, Masato Muraki, Haruo Yoda | 2005-03-22 |
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Masahiko Okunuki, Norio Saito, Masaki Takakuwa, Sayaka Tanimoto, Takeshi Haraguchi | 2005-03-22 |
| 6838682 | Electron beam exposure equipment and electron beam exposure method | Yasunari Sohda, Osamu Kamimura, Susumu Gotoh | 2005-01-04 |