Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969862 | Charged-particle-beam exposure apparatus and method of controlling same | Masato Muraki, Osamu Kamimura | 2005-11-29 |
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono, Kenichi Nagae, Yoshinori Nakayama, Harunobu Muto | 2005-09-20 |
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Masahiko Okunuki, Hiroya Ohta, Norio Saito, Sayaka Tanimoto, Takeshi Haraguchi | 2005-03-22 |