Issued Patents 2005
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969862 | Charged-particle-beam exposure apparatus and method of controlling same | Osamu Kamimura, Masaki Takakuwa | 2005-11-29 |
| 6965153 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono | 2005-11-15 |
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi, Yoshinori Nakayama +2 more | 2005-10-11 |
| 6946665 | Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus | Yoshinori Nakayama, Hiroya Ohta, Haruo Yoda, Norio Saitou | 2005-09-20 |
| 6919574 | Electron beam exposure apparatus, deflection apparatus, and electron beam exposure method | Shin Hashimoto, Haruo Yoda | 2005-07-19 |
| 6917045 | Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method | Shin Hashimoto, Haruo Yoda | 2005-07-12 |
| 6903353 | Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus | Yasunari Sohda, Shinichi Hashimoto | 2005-06-07 |
| 6903352 | Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method | Yoshikiyo Yui | 2005-06-07 |
| 6870171 | Exposure apparatus | Masaki Hosoda, Hiroya Ohta, Haruo Yoda | 2005-03-22 |
| 6864488 | Charged particle beam exposure method and apparatus | — | 2005-03-08 |