Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903353 | Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus | Masato Muraki, Shinichi Hashimoto | 2005-06-07 |
| 6838682 | Electron beam exposure equipment and electron beam exposure method | Osamu Kamimura, Hiroya Ohta, Susumu Gotoh | 2005-01-04 |