Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838682 | Electron beam exposure equipment and electron beam exposure method | Yasunari Sohda, Osamu Kamimura, Hiroya Ohta | 2005-01-04 |
SG
Susumu Gotoh
Hitachi High-Technologies: 1 patents #47 of 157Top 30%
Overall (2005): #95,761 of 245,428Top 40%
1
Patents 2005