Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969862 | Charged-particle-beam exposure apparatus and method of controlling same | Masato Muraki, Masaki Takakuwa | 2005-11-29 |
| 6838682 | Electron beam exposure equipment and electron beam exposure method | Yasunari Sohda, Hiroya Ohta, Susumu Gotoh | 2005-01-04 |