Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi, Yoshinori Nakayama +2 more | 2005-10-11 |
| 6930834 | Method of manufacturing diffractive optical element | Makoto Ogusu | 2005-08-16 |