Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi +2 more | 2005-10-11 |
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono, Kenichi Nagae, Masaki Takakuwa, Harunobu Muto | 2005-09-20 |
| 6946665 | Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus | Masato Muraki, Hiroya Ohta, Haruo Yoda, Norio Saitou | 2005-09-20 |