Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono, Kenichi Nagae, Masaki Takakuwa, Yoshinori Nakayama | 2005-09-20 |