Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965153 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Masato Muraki | 2005-11-15 |
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Kenichi Nagae, Masaki Takakuwa, Yoshinori Nakayama, Harunobu Muto | 2005-09-20 |
| 6903345 | Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method | Takayuki Yagi | 2005-06-07 |
| 6872950 | Electron optical system array, method of fabricating the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi | 2005-03-29 |
| 6872951 | Electron optical system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Takayuki Yagi, Yasuhiro Shimada | 2005-03-29 |
| 6872952 | Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi, Hiroshi Maehara | 2005-03-29 |