Issued Patents 2005
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924914 | Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member | Takahisa Kato, Yasuhiro Shimada, Yukio Furukawa | 2005-08-02 |
| 6920681 | Method of preparing an electromagnetic actuator using a substrate | Futoshi Hirose, Susumu Yasuda, Takahisa Kato | 2005-07-26 |
| 6903345 | Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono | 2005-06-07 |
| 6900925 | Optical deflector and method of producing same | Takahisa Kato, Yasuhiro Shimada | 2005-05-31 |
| 6897990 | Rocking member apparatus | Masahiro Kawase, Naoki Saito | 2005-05-24 |
| 6876051 | Aspherical microstructure, and method of fabricating the same | Takashi Ushijima | 2005-04-05 |
| 6872952 | Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Haruhito Ono, Hiroshi Maehara | 2005-03-29 |
| 6872951 | Electron optical system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono, Yasuhiro Shimada | 2005-03-29 |
| 6872950 | Electron optical system array, method of fabricating the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Haruhito Ono | 2005-03-29 |
| 6868214 | Optical waveguide, method of fabricating the waveguide, and optical interconnection device using the waveguide | Hajime Sakata, Toshihiko Ouchi | 2005-03-15 |