Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872952 | Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi, Haruhito Ono | 2005-03-29 |
| 6866973 | Photosensitive resin composition, resist composition, fabricating method for patterned substrate, and device | — | 2005-03-15 |