Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Masahiko Okunuki, Hiroya Ohta, Norio Saito, Masaki Takakuwa, Takeshi Haraguchi | 2005-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Masahiko Okunuki, Hiroya Ohta, Norio Saito, Masaki Takakuwa, Takeshi Haraguchi | 2005-03-22 |