Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936818 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6936819 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2005-08-30 |