Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Osamu Komuro, Hideo Todokoro | 2005-03-29 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida +1 more | 2005-03-08 |