Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933500 | Electron microscope | Kazutoshi Kaji, Shohei Terada | 2005-08-23 |
| 6894790 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Nobuyuki Iriki | 2005-05-17 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2005-03-08 |