Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2005-08-09 |
| 6894790 | Micropattern shape measuring system and method | Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Tadashi Otaka, Nobuyuki Iriki | 2005-05-17 |
| 6881597 | Method of manufacturing a semiconductor device to provide a plurality of test element groups (TEGs) in a scribe region | Kyoichiro Asayama, Fumiko Arakawa, Shiro Kamohara, Yuzuru Ohji | 2005-04-19 |