Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977376 | Method of prevention charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Hiroyasu Shichi | 2005-12-20 |
| 6970004 | Apparatus for inspecting defects of devices and method of inspecting defects | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Kaoru Umemura +1 more | 2005-11-29 |
| 6960765 | Probe driving method, and probe apparatus | Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto, Yuichi Hamamura +2 more | 2005-11-01 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Hiroyasu Shichi +2 more | 2005-08-09 |
| 6894287 | Microfabrication apparatus and microfabrication method | Muneyuki Fukuda, Hiroyasu Shichi, Osamu Watanabe | 2005-05-17 |
| 6858851 | Apparatus for specimen fabrication and method for specimen fabrication | Muneyuki Fukuda, Hiroyasu Shichi | 2005-02-22 |