Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979823 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2005-12-27 |
| 6970004 | Apparatus for inspecting defects of devices and method of inspecting defects | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Satoshi Tomimatsu +1 more | 2005-11-29 |
| 6937408 | Rotation recording apparatus and method of inspection thereof | Ryoheita Hattori, Naoyuki Kagami, Tetesuya Kokubo, Nobuya Matsubara | 2005-08-30 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2005-08-09 |